JPH0648328Y2 - 光学式膜厚自動測定装置 - Google Patents
光学式膜厚自動測定装置Info
- Publication number
- JPH0648328Y2 JPH0648328Y2 JP3125289U JP3125289U JPH0648328Y2 JP H0648328 Y2 JPH0648328 Y2 JP H0648328Y2 JP 3125289 U JP3125289 U JP 3125289U JP 3125289 U JP3125289 U JP 3125289U JP H0648328 Y2 JPH0648328 Y2 JP H0648328Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- measured
- calibration
- film thickness
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title claims description 22
- 239000012788 optical film Substances 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims description 120
- 230000007246 mechanism Effects 0.000 claims description 30
- 230000007723 transport mechanism Effects 0.000 claims description 25
- 239000010408 film Substances 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 230000032258 transport Effects 0.000 claims description 4
- 238000012546 transfer Methods 0.000 description 30
- 230000003595 spectral effect Effects 0.000 description 6
- 238000012937 correction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3125289U JPH0648328Y2 (ja) | 1989-03-17 | 1989-03-17 | 光学式膜厚自動測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3125289U JPH0648328Y2 (ja) | 1989-03-17 | 1989-03-17 | 光学式膜厚自動測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02122306U JPH02122306U (en]) | 1990-10-05 |
| JPH0648328Y2 true JPH0648328Y2 (ja) | 1994-12-12 |
Family
ID=31256980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3125289U Expired - Lifetime JPH0648328Y2 (ja) | 1989-03-17 | 1989-03-17 | 光学式膜厚自動測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648328Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002267419A (ja) * | 2001-03-14 | 2002-09-18 | Horiba Ltd | 膜厚測定装置 |
| EP3081921B1 (en) * | 2015-04-16 | 2019-08-14 | Heraeus Electro-Nite International N.V. | Spectrometer calibration method |
-
1989
- 1989-03-17 JP JP3125289U patent/JPH0648328Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02122306U (en]) | 1990-10-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |